vacuum uhv compatible stages - high precision

Unique Custom Vacuum Systems UHV Heating

Precision Magnetic Manipulators Unique Custom Vacuum Systems UHV Heating Stages Goniometers and Large and Small Transfer Systems These high-vacuum compatible loadlocks are designed to load wafers or other substrates into a SEMI-MESC compatible or custom process modules Using unique magnetically coupled transfer devices wafers can be

Vacuum Actuator Vacuum Compatible Actuators

Non-Magnetic and Vacuum-Compatible Working Principle N-310 PiezoWalk linear drives feature travel ranges of up to 125 mm and push/pull force capacities to 10 N in a compact package of only 25 x 25 x 12 mm With their high resolution NEXACT drives are ideal for high-precision

MadMotor™

2020-3-11Product Description: The MadMotor -UHV is a precision piezo motor driven micropositioning system for high precision alignment over long travel ranges The MadMotor -UHV stages use our proprietary MadMotor piezo motor technology allowing travel up to 10mm per axis with high resolution and excellent repeatability Eddy current sensors provide 100nm sensitivity over the

CF Flange Ultra High Vacuum Components

CF-style vacuum flanges and fittings are the standard for ultrahigh vacuum (UHV) applications They use a copper flat gasket placed between two knife edges to provide an extremely leak-tight vacuum seal Mating flanges have identical profiles eliminating the need to store two types or worry about compatibility Made with very high purity stainless steel and meticulous cleaning procedures

News

Watch our demonstration video for the RSX3K6 Ultra High Vacuum Rotation Stage The UHV RSX Rotation Stage features a precision cross-roller ring bearing providing high rotational accuracy capable of bearing loads in every direction It has a 18mm clear aperture anti-backlash spur gearing and can optionally be fitted with an optical UHV compatible rotary encoder

KOHZU PRECISION

2018-3-28Vacuum Compatible Stages Introduction 'Kohzu vacuum-compatible stages' are precise and durable positioning instruments ideally suited for the extreme requirements imposed by high-vacuum environments With few exceptions our vacuum-compatible stages exhibit performance characteristics comparable to those of Kohzu standard motion products

Vacuum and Ultrahigh

All our vacuum-compatible and ultrahigh-vacuum-compatible Picomotor actuators come with short Te?on-coated leads so you can make connections to your vacuum-chamber feedthrough If however you are also working with x-rays or other high-radiation applications we recommend ordering a custom version with Kapton-coated wire extensions

UHV Picomotor™ Large Aperture Optical Mounts

Overview Our ultra-high vacuum compatible picomotor large aperture optical mounts are designed for vacuum applications in UHV (10-9 Torr) VUV and EUV environments They provide the precision and stability of Picomotor actuators with our reliable ULTIMA Precision Optical Mounts They are available for 0 5- 1- 2- 3- and 4-in diameter optics

Vacuum Actuator Vacuum Compatible Actuators

Non-Magnetic and Vacuum-Compatible Working Principle N-310 PiezoWalk linear drives feature travel ranges of up to 125 mm and push/pull force capacities to 10 N in a compact package of only 25 x 25 x 12 mm With their high resolution NEXACT drives are ideal for high-precision

UHV Design

Corporate Business Responsive WordPress Theme UHV DESIGN is a specialist in UHV motion and heating products with primary focus on providing high-quality low- maintenance manipulation solutions for vacuum applications UHV Design has developed and manufactured vacuum manipulation solutions for over 15 years for high and ultra-high vacuum applications

Vacuum Compatible Picomotor™ Piezo Linear Actuators

All of our vacuum compatible and ultra-high vacuum compatible Picomotor actuators come with short Teflon-coated leads so you can make connections to your vacuum-chamber feedthrough If however you are working with X-rays or other high-radiation applications we offer versions with

CF Non

CF-style ConFlat flanges are the standard for ultra high vacuum (UHV) applications They use a flat gasket placed between two knife edges to provide a vacuum tight seal Mating flanges have identical profiles eliminating the need to store two types or worry about compatibility

Unique Custom Vacuum Systems UHV Heating

Precision Magnetic Manipulators Unique Custom Vacuum Systems UHV Heating Stages Goniometers and Large and Small Transfer Systems These high-vacuum compatible loadlocks are designed to load wafers or other substrates into a SEMI-MESC compatible or custom process modules Using unique magnetically coupled transfer devices wafers can be

Vacuum Advantage

Custom high-vacuum 1 m travel linear actuator Thermal Management Thermal management is key in vacuum systems because they cannot rely on convection for the removal of heat from the motors and bearings Without thermal management methods stage performance suffers and life can be reduced from that of an equivalent system operated in atmosphere

Vacuum and Ultrahigh

All our vacuum-compatible and ultrahigh-vacuum-compatible Picomotor actuators come with short Te?on-coated leads so you can make connections to your vacuum-chamber feedthrough If however you are also working with x-rays or other high-radiation applications we recommend ordering a custom version with Kapton-coated wire extensions

KOHZU PRECISION

2018-3-28Vacuum Compatible Stages Introduction 'Kohzu vacuum-compatible stages' are precise and durable positioning instruments ideally suited for the extreme requirements imposed by high-vacuum environments With few exceptions our vacuum-compatible stages exhibit performance characteristics comparable to those of Kohzu standard motion products

New L

June 2020 Auburn MA – A leader in nanopositioning solutions PI (Physik Instrumente) LP introduces a new high precision linear translation stage family for High Vacuum (HV) and Ultra High Vacuum (UHV) applications The L-509 vacuum stage series is offered for 3 different vacuum levels: 10-6

Custom Vacuum Systems UHV Heating Stages

UHV Transfer loadlocks and transfer systems can be customized or modified to fit many requirements where a standard loadlock cannot be used For non-standard process chambers with an interface other than a SEMI-compatible interface modifications can be made to the loadlock mounting flange or adapters can be provided

Ultra High Vacuum Isolation Valves

The ultra-High vacuum valve is lightweight and has a compact profile enabling it to fit easily into vacuum systems where space is tight The UHV Valve has a copper bonnet seal and an elastomer nosepiece seal which limits outgassing and permeation allowing a lower base system pressure

4 080 Linear Stages Vacuum Call Us Today

2018-8-6The PLS-85 Vacuum linear stages are especially suited for high precision applications with limited space conditions while allowing loads of up to 10 kg Cross-roller bearings guarantee very high guiding stiffness Driven by a re-circulating ball screw with 1 mm pitch The PLS-85 Vacuum can be mounted in any orientation For demanding positioning

Precision Motion Control Systems

ALIO Industries has quickly become a world leader with nano-precision vacuum stage and robotic systems All ALIO products with exception of the air bearing systems are UHV compatible Linear rotary open center X-Y Hexapods Tripods and goniometer stages and systems are available in HV (10-7 TORR) or UHV (10-10 TORR) with ultra low outgassing

Positioning in High Vacuum (HV) and Ultrahigh

PI offers a wide range of motorized linear stages to supply high-precision industrial markets like semiconductor and photonics as well as high-end research Vacuum versions are available for a large number of different models Multi-axis compositions can be set up with adapter brackets or specialized vertical stages and compatible rotation stages

Precision Motion Control in High Vacuum and UHV

2018-6-29in a high-vacuum environment of 10-7 hPa with a precision of less than 100 nm and 10 rad A stable position excellent repeatability and high stiffness are essential requirements ALIGNING THE X-RAY CAMERA IN UHV POSITIONING SAMPLES ON 6 AXES OPTIMIZED THROUGH-PUT IN PRODUCTION SYSTEMS Low vibration fast and precise positioning

P

PI offers a wide range of motorized linear stages to supply high-precision industrial markets like semiconductor and photonics as well as high-end research Vacuum versions are available for a large number of different models Multi-axis compositions can be set up with adapter brackets or specialized vertical stages and compatible rotation stages

FZ Series Vertical Stage

The 80mm square stage utilizes precision crossed rollers for guiding the linear travel resulting in 10mm travel in the vertical direction The wedge configuration provides work surface access from any direction with a precision optical position sensor encoding the directly on the vertical displacement

Vacuum Compatible Picomotor™ Piezo Linear Actuators

All of our vacuum compatible and ultra-high vacuum compatible Picomotor actuators come with short Teflon-coated leads so you can make connections to your vacuum-chamber feedthrough If however you are working with X-rays or other high-radiation applications we offer versions with

Ultra High Vacuum Piezo Stages and Systems

SmarAct stages are not only the perfect match for applications in ambient conditions but also for more extreme environments like high vacuum (HV 1E-6 mbar) and ultra-high vacuum (UHV 1E-11 mbar) Most of the stages presented on this website are available in versions specially prepared to be able to operate in vacuum conditions